Integrated antennas on Si, proton-implanted Si and Si-on-quartz

Abstract

High performance antennas have been realized on proton-implanted Si with 10/sup 6/ /spl Omega/-cm resistivity. Sharp antenna resonance and low loss up to 20 GHz are observed indicating excellent antenna quality. In contrast, very poor antenna characteristics are found on conventional oxide-isolated Si because of the lossy substrate.