TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference · 2007 · 39 citations · 8 references
EngineeringElectrical EngineeringMechanical EngineeringElectronic MaterialsMicroelectromechanical SystemsMicroelectronicsMems CharacterizationMems DesignMems MaterialsMems ResonatorsMems TestingRf MemsBulk Mode ResonatorsHigh-frequency OperationHigh-quality-factor ResonatorsQuality Factor MeasurementResonant MemsResonator Quality FactorRf Mems Resonators
In this paper, we report a 6.3MHz Lamé-mode square resonator with fully differential drive and sense electronics, exhibiting quality factor, Q values exceeding 1 million in ambient pressures as high as 100Pa. A maximum Q value of 1.6 million was experimentally measured at vacuum pressure of 36 μTorr. It was also experimentally observed that the Q value for the bulk mode resonator was relatively independent for pressures below 100Pa suggesting that the Q is pressure limited for pressure higher than 100Pa. This resonator was fabricated using SOIMUMPs process from MEMSCAP.
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A 12 MHz micromechanical bulk acoustic mode oscillator
T. Mattila, Jyrki Kiihamäki, T. Lamminmäki et al. · Sensors and Actuators A Physical · 2002 · 147 citations