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Room temperature deposition of Al-doped ZnO films on quartz substrates by radio-frequency magnetron sputtering and effects of thermal annealing

Materials EngineeringMaterials ScienceRoom Temperature DepositionAluminium NitrideEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsRadio-frequency Magnetron SputteringThin FilmsChemical DepositionAl-doped Zno FilmsThin Film Processing