Room-temperature deposition of transparent conducting Al-doped ZnO films by RF magnetron sputtering method - Concepedia

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Room-temperature deposition of transparent conducting Al-doped ZnO films by RF magnetron sputtering method

210

Citations

24

References

2008

Year

Weifeng Yang, Zhuguang Liu, Dong‐Liang Peng, Feng Zhang, Huolin Huang, Yannan Xie, Zhengyun Wu

Applied Surface Science

Materials ScienceMaterials EngineeringElectrical EngineeringAluminium NitrideEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsRf MagnetronRoom-temperature DepositionGallium OxideAl-doped Zno FilmsThin Film Processing

References

	Year	Citations

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