Diamond and Amorphous Carbon MEMS

Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond

T. A. Friedmann, J. P. Sullivan, J. A. Knapp et al. · Applied Physics Letters · 1997 · 306 citations

Natural Sciences, Materials Engineering, Materials Science +15

Microscopic Structure of Tetrahedral Amorphous Carbon

Nigel A. Marks, David R. McKenzie, Bernard Pailthorpe et al. · Physical Review Letters · 1996 · 188 citations

Natural Sciences, Chemistry, Materials Science +12

Diamond MEMS — a new emerging technology

E. Kohn, P. Gluche, M. Adamschik · Diamond and Related Materials · 1999 · 166 citations

Engineering, Electrical Engineering, Materials Science +12

Stress relaxation and thermal evolution of film properties in amorphous carbon

J. P. Sullivan, T. A. Friedmann, Albert G. Baca · Journal of Electronic Materials · 1997 · 153 citations

Natural Sciences, Materials Science, Physics +17

Fabrication of glassy carbon microstructures by soft lithography

Olivier Schueller, Scott Brittain, George M. Whitesides · Sensors and Actuators A Physical · 1999 · 118 citations

Engineering, Materials Engineering, Materials Science +13