MEMS flow sensors for nano-fluidic applications

Micro-liquid flow sensor

Theo Lammerink, Niels R. Tas, J.H.J. Fluitman · Sensors and Actuators A Physical · 1993 · 201 citations · Full text

A suspended microchannel with integrated temperature sensors for high-pressure flow studies

Shuyun Wu, Yitshak Zohar, Yuan‐Chuan Tai et al. · 2002 · 54 citations

Engineering, Mechanical Engineering, Fluid Dynamics +16

Thermal flow sensor for liquids and gases

M. Ashauer, H. Glosch, F. Hedrich et al. · 2002 · 48 citations

Engineering, Chemical Engineering, Mechanical Engineering +12

Modular concept for fluid handling systems. A demonstrator micro analysis system

T.S.J. Lammerink, V.L. Spiering, J.H.J. Fluitman et al. · 2002 · 44 citations · Full text

Engineering, Chemical Engineering, Actuators +10

A novel flow sensor with high time resolution based on differential pressure principle

Martin Richter, M. Wackerle, Peter Woias et al. · 1999 · 31 citations

Engineering, Chemical Engineering, Fluid Dynamics +16