Structural and electrical characterizations of n-type implanted layers and ohmic contacts on 3C-SiC - Concepedia

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Structural and electrical characterizations of n-type implanted layers and ohmic contacts on 3C-SiC

14

Citations

20

References

2011

Year

Xi Song, J. Biscarrat, Jean-François Michaud, F. Cayrel, Marcin Zieliński, Thierry Chassagne, Marc Portail, Emmanuel Collard, Daniel Alquier

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Materials ScienceElectrical EngineeringEngineeringN-type Implanted LayersElectrical CharacterizationsApplied PhysicsSemiconductor Device FabricationStructural CeramicOhmic ContactsCarbideSemiconductor Device

References

	Year	Citations

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