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Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySemiconductor MaterialsThin FilmsChemical Vapor DepositionSemiconductor Thin FilmsSilicon MaterialsThin Film Mechanical PropertiesThin-film DepositionThin-film MaterialsNitride Thin FilmsNitrides Thin FilmsPlasma-assisted Chemical Vapor DepositionPlasma-enhanced Chemical Vapor DepositionPlasma-enhanced DepositionSilicon NitrideTitanium Nitride Coatings
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Handbook of X-Ray Photoelectron Spectroscopy
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