Applied Physics Letters · 1995 · 554 citations · 2 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMaterials ChemistryNanomaterialsAmorphous MaterialsChemical Vapor DepositionComposite MaterialsInorganic MaterialsNanocompositesNanostructured MaterialsElastic ModulusHardnessNanocrystalline MaterialsNanocrystalsNanostructured Inorganic MaterialsPlasma-assisted Chemical Vapor DepositionPlasma-enhanced Chemical Vapor DepositionSilicon-containing Alloys
Thin films of novel superhard composite materials consisting of TiN nanocrystals in an amorphous Si3N4 matrix have been prepared by means of plasma chemical vapor deposition. The films show a high Vickers hardness of 5000 kg/mm2 and elastic modulus of ≳500 GPa, and they are resistant against oxidation in air up to ≥800 °C. The theoretical background of these unusual properties are briefly discussed and practical rules suggested according to which similar properties should be expected for composites of other ternary systems.
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Nature · 1932 · 834 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +12