Adsorption and Desorption Rate of Multicomponent Organic Species on Silicon Wafer Surface

Abstract

The time-dependent change in concentrations of organic species on a silicon wafer surface, the fruit basket phenomenon, is studied using a rate theory for a multicomponent system consisting of a large number of organic species. The theoretical model and the rate parameters evaluated in this study are shown to be effective for predicting the trend and the abundance of nine organic species on the silicon wafer surface in a clean room, because the trend in organic species are classified using the desorption rate constant and because their concentrations in a steady state have a clear relationship with the ratio of the adsorption rate to the desorption rate constant. © 2001 The Electrochemical Society. All rights reserved.