Concepedia

Tamotsu Ogata

TO

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Publications

2

Citations

60

H-Index

2

Active since

1996

Affiliations

Mitsubishi Electric (Japan)(Current)

Tamotsu Ogata is an author at Mitsubishi Electric (Japan) specializing in materials science, semiconductor devices, and semiconductor reliability.

Publications per year

1996–1998

2

Publications

2

Impact of Organic Contaminants from the Environment on Electrical Characteristics of Thin Gate Oxides

Tamotsu Ogata, Cozy BAN, Akemi Ueyama et al. · Japanese Journal of Applied Physics · 1998 · 46 citations

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Ultrathin Silicon Nitride Films Fabricated by Single‐Wafer Processing Using an SiH2Cl2 ‐  NH 3 ‐  H 2 System and In Situ  H 2 Cleaning

K. Kobayashi, Yutaka Inaba, Tamotsu Ogata et al. · Journal of The Electrochemical Society · 1996 · 14 citations

, , +17

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