Concepedia

Akemi Ueyama

AU

Statistics

Publications

3

Citations

109

H-Index

3

Active since

1993

Affiliations

Mitsubishi Electric (Japan)(Current)

Akemi Ueyama is an author at Mitsubishi Electric (Japan) specializing in surface chemistry, materials science, and surface science.

Publications per year

1993–2004

3

Publications

3

Mechanism for the Formation of Poly(phenylsilsesquioxane)

Shigeyuki Yamamoto, Naoki Yasuda, Akemi Ueyama et al. · Macromolecules · 2004 · 51 citations

, , +7

Impact of Organic Contaminants from the Environment on Electrical Characteristics of Thin Gate Oxides

Tamotsu Ogata, Cozy BAN, Akemi Ueyama et al. · Japanese Journal of Applied Physics · 1998 · 46 citations

, , +17

<title>Study on the over-top-coating suppressing surface insoluble layer generation for chemical amplification resist</title>

Teruhiko Kumada, Youko Tanaka, Akemi Ueyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 12 citations

, , +10

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