Concepedia

Teruhiko Kumada

TK

Statistics

Publications

2

Citations

23

H-Index

2

Active since

1991

Affiliations

Mitsubishi Electric (Japan)(Current)

Teruhiko Kumada is an author at Mitsubishi Electric (Japan) specializing in natural sciences, materials engineering, and materials science.

Publications per year

1991–1993

2

Publications

2

<title>Study on the over-top-coating suppressing surface insoluble layer generation for chemical amplification resist</title>

Teruhiko Kumada, Youko Tanaka, Akemi Ueyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 12 citations

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Relationship between patterning and dissolution charactaristics of chemical amplification resists using partly protected poly(p-vinylphenol).

Teruhiko Kumada, Shigeru Kubota, Hiroshi Koezuka et al. · Journal of Photopolymer Science and Technology · 1991 · 11 citations · Full text

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