Concepedia

Takatoshi Nagoya

TN

Statistics

Publications

2

Citations

137

H-Index

2

Active since

1995

Affiliations

ShinEtsu Chemical (Japan)(Current)

Hiroshima University

Takatoshi Nagoya is an author at ShinEtsu Chemical (Japan) specializing in engineering, transport phenomena, and applied physics.

Top concepts

Publications per year

1995–1996

2

Publications

2

Model on transport phenomena and epitaxial growth of silicon thin film in SiHCl3H2 system under atmospheric pressure

Hitoshi Habuka, Takatoshi Nagoya, Masanori Mayusumi et al. · Journal of Crystal Growth · 1996 · 103 citations

Modeling of Epitaxial Silicon Thin‐Film Growth on a Rotating Substrate in a Horizontal Single‐Wafer Reactor

Hitoshi Habuka, Takatoshi Nagoya, Masatake Katayama et al. · Journal of The Electrochemical Society · 1995 · 34 citations

, , +12

1–2 of 2