Bouncing mode electrostatically actuated scanning micromirror for video applications

Abstract

We present a design and operation concept of a scanning device based on an electrostatic torsional micromirror that is aimed to fulfil the requirements of motion linearity, high operational frequency and low actuation voltages imposed by laser display applications. The operational mode incorporates a contact event between the mirror and an elastic constraint followed by a bouncing and an inversion of motion. A triangular response signal is obtained by the application of an actuation voltage which is piecewise constant in time. The tuning of the resonant frequency through the control of the applied voltage permits the synchronization of the response of the microfabricated device with a video signal.