Low profile integrated passive devices with 3D high density capacitors ideal for embedded and die stacking solutions

Catherine Bunel, M. Pommier, Sébastien Jacqueline

2012 4th Electronic System-Integration Technology Conference · 2012 · 18 citations · 0 references

Concepts

Abstract

• The low profile IPDIA technology capability is limited by the density of the trench capacitor, more explicitly by the depth of the trench. • The 80μm Low Profile node dedicated to the highest capacitor density is qualified. • IPDIA is providing the lowest profile 3D Silicon capacitors with a superior stability and reliability over a wide temperature range. • Ideal solution where volume and weight are major concerns.