Concepedia

Infrared spectra of fluorinated amorphous silicon prepared by D.C. glow discharge

M. Janai, L. Frey, R. Weil, B. Pratt

Solid State Communications · 1983 · 21 citations · 16 references

DOI

Concepts

References

16

Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering

M. H. Brodsky, M. Cardona, J. J. Cuomo · Physical review. B, Solid state · 1977 · 1.6K citations

, , +17

Characterized of glow-discharge deposited a-Si:H

H. Fritzsche · Solar Energy Materials · 1980 · 322 citations

, , +5

Electrical and optical properties of amorphous Si:F:H alloys

A. Madan, Stanford R. Ovshinsky, E. Benn · Philosophical Magazine B · 1979 · 226 citations

, , +17

Chemical sputtering of fluorinated silicon

Yung-Yi Tu, T. J. Chuang, Harold F. Winters · Physical review. B, Condensed matter · 1981 · 226 citations

, , +17

Silicon-Fluorine Chemistry. I. Silicon Difluoride and the Perfluorosilanes<sup>1</sup>

Peter L. Timms, R. A. Kent, Thomas C. Ehlert et al. · Journal of the American Chemical Society · 1965 · 150 citations

, , +8