Concepedia

Microstructural analysis and mechanical properties of TaN–Ag nanocomposite thin films

C.C. Tseng, J.H. Hsieh, Seon-Ah Jang, Yu-Jie Chang, Weite Wu

Thin Solid Films · 2009 · 28 citations · 18 references

DOI

Concepts

References

18

Hard and superhard nanocomposite coatings

J. Musil · Surface and Coatings Technology · 2000 · 1.1K citations

, , +12

Magnetron sputtering of hard nanocomposite coatings and their properties

J. Musil, J. Vlček · Surface and Coatings Technology · 2001 · 233 citations

, , +14

Mechanical properties of superhard nanocomposites

S. Vepřek, A. S. Argon · Surface and Coatings Technology · 2001 · 173 citations

, , +14

Reactive sputter deposition and properties of TaxN thin films

Tommi Riekkinen, J. M. Molarius, Tomi Laurila et al. · Microelectronic Engineering · 2002 · 159 citations

, , +14

Crystallographic and morphological characterization of reactively sputtered Ta, TaN and TaNO thin films

M. Stavrev, D. Fischer, Christian Wenzel et al. · Thin Solid Films · 1997 · 155 citations

, , +13