Ferroelectrics · 1999 · 20 citations · 3 references
EngineeringElectrical EngineeringMechanical EngineeringSensorsThin FilmsVibrationAcoustic SensorsMechanical SensorsMicroelectromechanical SensorsMicromachiningStrain SensorsVibration MeasurementAccelerometer SensorsAccelerometersCantilever MechanicsMicrofabricated SensorsMicromachined SensorsPiezoelectric AccelerometersSeismic ResponseThin-film Piezoelectrics
Abstract In this paper the simple accelerometers based on PZT thin films were developed and characterized. The functions of seismic mass and spring are given by a boss loaded cantilever structure. The strain of the cantilever is detected by a Pb(Zr.Ti)O3 thin film. A 2 mm long and 0.8 mm wide cantilever yielded a response of 0.6 mV/g* in the frequency interval between 1 and 600 Hz. With Δf = 600Hz a limit of about 1 mg* at 1 Hz. and less above this frequency, was observed. The response predicted by the analytical model is close to the actual response of the device. A working miniaturized accelerometer prototype could be thus demonstrated.
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