Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions

Measurement of piezoelectric coefficients of ferroelectric thin films

K. Lefki, G. J. M. Dormans · Journal of Applied Physics · 1994 · 591 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Interferometric measurements of electric field-induced displacements in piezoelectric thin films

Andréi L. Kholkin, Ch. Wütchrich, D. V. Taylor et al. · Review of Scientific Instruments · 1996 · 414 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +15

Piezoelectric micromotors for microrobots

Anita M. Flynn, Lee S. Tavrow, Stephen F. Bart et al. · Journal of Microelectromechanical Systems · 1992 · 229 citations

Engineering, Mechanical Engineering, Robotics Engineering +15

Fabrication and characterization of PZT thin-film vibrators for micromotors

Paul Muralt, Markus Köhli, Thomas Maeder et al. · Sensors and Actuators A Physical · 1995 · 185 citations · Full text

Engineering, Materials Science, Mechatronics Engineering +12

Ferroelectric thin film ultrasonic micromotors

Krishna Udayakumar, Stephen F. Bart, Anita M. Flynn et al. · 2002 · 79 citations

Natural Sciences, Materials Engineering, Materials Science +17