The effect of oxygen concentration on the low temperature deposition of TiO2 thin films

Effect of total and oxygen partial pressures on structure of photocatalytic TiO2 films sputtered on unheated substrate

P. Zeman, Sotohiro Takabayashi · Surface and Coatings Technology · 2002 · 219 citations

Natural Sciences, Materials Engineering, Materials Science +16

Low-temperature sputtering of crystalline TiO2 films

J. Musil, D. Heřman · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2006 · 109 citations

Natural Sciences, Materials Engineering, Materials Science +17

The effect of O2 partial pressure on the structure and photocatalytic property of TiO2 films prepared by sputtering

Baoshun Liu, Xiujian Zhao, Qingnan Zhao et al. · Materials Chemistry and Physics · 2004 · 80 citations

Natural Sciences, Materials Engineering, Materials Science +16

Plasma emission control of reactive sputtering process in mid-frequency mode with dual cathodes to deposit photocatalytic TiO2 films

Shin Ohno, Daisuke Sato, Masato Kon et al. · Thin Solid Films · 2003 · 62 citations

Natural Sciences, Materials Engineering, Materials Science +17

The mechanism of low temperature deposition of crystalline anatase by reactive DC magnetron sputtering

Mark C. Barnes, Len Green, Nong‐Moon Hwang et al. · Surface and Coatings Technology · 2004 · 60 citations

Natural Sciences, Materials Engineering, Materials Science +13