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Plasma emission control of reactive sputtering process in mid-frequency mode with dual cathodes to deposit photocatalytic TiO2 films

DOI

62

Citations

11

References

2003

Year

Shin Ohno, Daisuke Sato, Masato Kon, Pung Keun Song, Masahiro Yoshikawa, Katsuhiko Suzuki, Peter Frach, Yuzo Shigesato
Thin Solid Films

References

YearCitations

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