Evaluation of directly bonded silicon wafer interface by the magic mirror method

Bonding of silicon wafers for silicon-on-insulator

W. Maszara, Georges Goetz, A.L. Caviglia et al. · Journal of Applied Physics · 1988 · 861 citations

Engineering, Materials Engineering, Materials Science +17

Wafer bonding for silicon-on-insulator technologies

J. B. Lasky · Applied Physics Letters · 1986 · 574 citations

Engineering, Electrical Engineering, Materials Science +17

Silicon-to-silicon direct bonding method

Masaru Shimbo, K. Furukawa, K. Fukuda et al. · Journal of Applied Physics · 1986 · 507 citations

Engineering, Materials Engineering, Materials Science +17

Dielectric isolation of silicon by anodic bonding

T. R. Anthony · Journal of Applied Physics · 1985 · 75 citations

Engineering, Materials Engineering, Materials Science +16

Characterization of Microdeformation and Crystal Defects in Silicon Wafer Surfaces

Koichi Kugimiya · Journal of The Electrochemical Society · 1983 · 25 citations · Full text

Engineering, Materials Engineering, Materials Science +14