Concepedia

Haruo Shirotori

HS

Statistics

Publications

2

Citations

32

H-Index

2

Active since

1990

Affiliations

Sumitomo Metal Mining (Japan)(Current)

Haruo Shirotori is an author at Sumitomo Metal Mining (Japan) specializing in materials science, engineering, and materials engineering.

Publications per year

1990–1991

2

Publications

2

Evaluation of directly bonded silicon wafer interface by the magic mirror method

Osamu Okabayashi, Haruo Shirotori, Hiroyuki Sakurazawa et al. · Journal of Crystal Growth · 1990 · 20 citations

Engineering, Materials Engineering, Materials Science +14

Structural Evaluation of Silicon‐on‐Insulator Fabricated by a Direct Wafer Bonding and Numerically Controlled Polishing Technique

A. Yamada, B. L. Jiang, G. A. Rozgonyi et al. · Journal of The Electrochemical Society · 1991 · 12 citations

Engineering, Materials Engineering, Materials Science +17

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