A highly long-term stable silicon-based pH sensor fabricated by pulsed laser deposition technique

Development of an Ion-Sensitive Solid-State Device for Neurophysiological Measurements

P. Bergveld · IEEE Transactions on Biomedical Engineering · 1970 · 2.1K citations

Engineering, Biomedical Engineering, Electrical Engineering +17

Methods of isfet fabrication

Tadayuki Matsuo, M. Esashi · Sensors and Actuators · 1981 · 343 citations

Engineering, Electrical Engineering, Microfabrication +10

Ion-sensing devices with silicon nitride and borosilicate glass insulators

D.L. Harame, Luc Bousse, J. Shott et al. · IEEE Transactions on Electron Devices · 1987 · 221 citations

Natural Sciences, Electrical Engineering, Materials Science +15

Pulsed Laser Deposition

G. K. Hubler · MRS Bulletin · 1992 · 212 citations

Comparison of the hysteresis of Ta2O5 and Si3N4 pH-sensing insulators

Luc Bousse, Shahriar Mostarshed, B. van der Schoot et al. · Sensors and Actuators B Chemical · 1994 · 180 citations

Engineering, Materials Engineering, Materials Science +9