Applied Surface Science · 2011 · 27 citations · 15 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistrySemiconductor MaterialsChemical Vapor DepositionSemiconductor Crystal GrowthSemiconductor Thin FilmsSilicon MaterialsThin-film DepositionThin-film MaterialsSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Carbide Crystal GrowthSilicon NitrideSilicon Thin Films
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