Concepedia

Fabrication and performance of thin film transistors, TFTs, incorporating doped μc-Si source and drain contacts, and boron-compensated μc-Si channel layers

Siliang He, M. J. Williams, D. J. Stephens, G. Lucovsky

Journal of Non-Crystalline Solids · 1993 · 28 citations · 4 references

DOI

Concepts

References

4

High performance low-temperature poly-Si n-channel TFTs for LCD

A. Mimura, N. Konishi, Kyosuke Ono et al. · IEEE Transactions on Electron Devices · 1989 · 174 citations

, , +17

High-performance poly-Si TFTs with ECR-plasma hydrogen passivation

Takashi Unagami, T. Takeshita · IEEE Transactions on Electron Devices · 1989 · 14 citations

, , +16

Transmission electron microscopy and vibrational spectroscopy studies of undoped and doped Si,H and Si,C:H films

Y. L. Chen, C. Wang, G. Lucovsky et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 13 citations

, , +17

Barrier-limited transport in μ<i>c</i>-Si and μ<i>c</i>-Si,C thin films prepared by remote plasma-enhanced chemical-vapor deposition

G. Lucovsky, C. Wang, Y. L. Chen · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 13 citations

, , +17