D. J. Stephens

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Active since

1990

Affiliations

North Carolina State University(Current)

D. J. Stephens is an author at North Carolina State University specializing in materials science, semiconductor thin films, and chemical vapor deposition.

Publications per year

1990–1994

Publications

Substrate temperature dependence of subcutaneous oxidation at Si/SiO2 interfaces formed by remote plasma-enhanced chemical vapor deposition

S. S. Kim, D. J. Stephens, G. Lucovsky et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 55 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fabrication and performance of thin film transistors, TFTs, incorporating doped μc-Si source and drain contacts, and boron-compensated μc-Si channel layers

Siliang He, M. J. Williams, D. J. Stephens et al. · Journal of Non-Crystalline Solids · 1993 · 28 citations

Engineering, Electrical Engineering, Materials Science +12

Integrated processing of amorphous and microcrystalline Si thin film transistors by plasma-assisted chemical-vapor deposition

G. Lucovsky, Siliang He, M. J. Williams et al. · Microelectronic Engineering · 1994 · 15 citations

Engineering, Materials Engineering, Materials Science +14

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