Secondary ion mass spectrometry with gas cluster ion beams

Computer simulation of local order in condensed phases of silicon

Frank H. Stillinger, Thomas A. Weber · Physical review. B, Condensed matter · 1985 · 5.3K citations

Natural Sciences, Materials Science, Physics +16

Surface treatment of diamond films with Ar and O2 cluster ion beams

Noriaki Toyoda, N. Hagiwara, Jiro Matsuo et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 81 citations

Engineering, Materials Engineering, Materials Science +15

Sputtering of elemental metals by Ar cluster ions

Jiro Matsuo, Noriaki Toyoda, Makoto Akizuki et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 55 citations

Natural Sciences, Materials Engineering, Materials Science +12

TRIM-DYNAMIC applied to marker broadening and SIMS depth profiling

J.P. Biersack · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 47 citations

Engineering, Computer Science, Digital Imaging +3

Low-damage surface processing by gas cluster ion beams

Makoto Akizuki, Jiro Matsuo, Miyuki Harada et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 45 citations

Engineering, Materials Engineering, Materials Science +14