Concepedia

Publication | Closed Access

Low-damage surface processing by gas cluster ion beams

DOI

45

Citations

8

References

1995

Year

Makoto Akizuki, Jiro Matsuo, Miyuki Harada, S. Ogasawara, A. Doi, Kiyoshi Yoneda, Tomofumi Yamaguchi, Gikan H. Takaoka, C. Ascheron, Isao Yamada
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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