N. Hagiwara

Surface treatment of diamond films with Ar and O2 cluster ion beams

Noriaki Toyoda, N. Hagiwara, Jiro Matsuo et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 81 citations

Materials Science, Ion Implantation, Engineering +6

Angular distributions of the particles sputtered with Ar cluster ions

Noriaki Toyoda, Hiroaki Kitani, N. Hagiwara et al. · Materials Chemistry and Physics · 1998 · 65 citations

Engineering, Physics, Natural Sciences +8

Surface smoothing mechanism of gas cluster ion beams

Noriaki Toyoda, N. Hagiwara, Jiro Matsuo et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2000 · 54 citations

Engineering, Physics, Surface Science +3

Surface smoothing effects with reactive cluster ion beams

Noriaki Toyoda, Hiroaki Kitani, N. Hagiwara et al. · Materials Chemistry and Physics · 1998 · 37 citations

Ion Beam, Surface Science, Ion Emission +1

Surface smoothing of CVD-diamond membrane for X-ray lithography by Gas Cluster Ion Beam

Akira Nishiyama, Masahiro Adachi, Noriaki Toyoda et al. · AIP conference proceedings · 1999 · 17 citations