Hiroaki Kitani

Incident angle dependence of the sputtering effect of Ar-cluster-ion bombardment

Hiroaki Kitani, Noriaki Toyoda, Jiro Matsuo et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 89 citations

Ion Implantation, Engineering, Physics +5

Angular distributions of the particles sputtered with Ar cluster ions

Noriaki Toyoda, Hiroaki Kitani, N. Hagiwara et al. · Materials Chemistry and Physics · 1998 · 65 citations

Engineering, Physics, Natural Sciences +8

Reactive sputtering by SF6 cluster ion beams

Noriaki Toyoda, Hiroaki Kitani, Jiro Matsuo et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 61 citations

Engineering, Physics, Applied Physics +5

Surface smoothing effects with reactive cluster ion beams

Noriaki Toyoda, Hiroaki Kitani, N. Hagiwara et al. · Materials Chemistry and Physics · 1998 · 37 citations

Ion Beam, Surface Science, Ion Emission +1