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Growth, structure, and tribological behavior of atomic layer-deposited tungsten disulphide solid lubricant coatings with applications to MEMS

Materials ScienceMaterials EngineeringTribological CoatingEngineeringSolid Lubricant CoatingsMechanical EngineeringApplied PhysicsTribological BehaviorAtomic Layer-deposited TungstenTribological PropertyMicrostructure