Publication | Closed Access
Fabrication of nano-dot- and nano-ring-arrays by nanosphere lithography
101
Citations
10
References
1996
Year
EngineeringBeam LithographyMicrofabricationNanomaterialsNanotechnologyApplied PhysicsNanolithographyNanofabricationNanosphere LithographyNanometrologyNanolithography Method
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