Properties of thin films deposited from HMDSO/O2 induced remote plasma: Effect of oxygen fraction

On the use of actinometry to measure the dissociation in O₂DC glow discharges: determination of the wall recombination probability

Daniel Pagnon, J. Amorim, Jacimar Nahorny et al. · Journal of Physics D Applied Physics · 1995 · 161 citations

Natural Sciences, Chemistry, Physics +16

Characterization of transformer coupled oxygen plasmas by trace rare gases-optical emission spectroscopy and Langmuir probe analysis

Nicholas Fuller, M. V. Malyshev, Vincent M. Donnelly et al. · Plasma Sources Science and Technology · 2000 · 128 citations

Natural Sciences, Materials Science, Physics +15

Deposition of SiO films from O2/HMDSO plasmas

Dirk Hegemann, U. Vohrer, Christian Oehr et al. · Surface and Coatings Technology · 1999 · 113 citations

Natural Sciences, Materials Engineering, Materials Science +14

Polymerization of Organosilicones in Microwave Discharges

A. M. Wróbel, M. R. Wertheimer, J. Dib et al. · Journal of Macromolecular Science Part A - Chemistry · 1980 · 108 citations

Natural Sciences, Chemistry, Materials Science +17

Plasma-polymerized coatings using HMDSO precursor for iron protection

Christine Vautrin‐Ul, C. Boisse-Laporte, N Benissad et al. · Progress in Organic Coatings · 2000 · 105 citations

Engineering, Materials Engineering, Materials Science +16