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On the use of actinometry to measure the dissociation in O<sub>2</sub>DC glow discharges: determination of the wall recombination probability
159
Citations
30
References
1995
Year
EngineeringAtomic Emission SpectroscopyGlow DischargeChemistryElectronic Excited StateAbsolute ConcentrationPulse PowerActinometric TechniqueIon EmissionBiophysicsPhysicsWall Recombination ProbabilityAtomic PhysicsPhysical ChemistryQuantum ChemistryWall TemperatureNatural SciencesSpectroscopyApplied PhysicsGas Discharge PlasmaChemical Kinetics
A study has been performed to re-investigate the actinometric technique used to determine the absolute concentration of O atoms in DC O2 flowing glow discharges for pressures ranging from 0.36 to 2 Torr and discharge currents ranging from 5 to 80 mA in Pyrex tubes of three different diameters (16, 7 and 4 mm). Actinometric measurements using O(3P-3S) 844 nm, O(5P-5S) 777 nm and Ar(2p1-1S2) 750 nm transitions are compared to VUV absorption spectrometry. The choice of the excitation cross sections for the calculations of atomic excitation rates as a function of the reduced electric field using a Boltzmann code and the contribution of the quenching processes of the excited states are discussed. The dissociation ratio (O)/(O2) can be determined from the ratio of intensities I844/I750 by the relation (O)/(O2)=C3P2p1 I844/I750. We have found that C3P2p1 remains constant (C3P2p1=2.6*10-3) throughout the range of experimental conditions investigated. The recombination probability gamma of the O atoms at the wall is calculated and correlated to the wall temperature of the Pyrex tubes. The variation of the recombination probability as a function of the wall temperature is fitted by the relation gamma =0.94exp(-1780/Twall) for 300<Twall<500 K.
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