Application of microscale plasma to material processing

Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC

C.K. Birdsall · IEEE Transactions on Plasma Science · 1991 · 1.3K citations

Natural Sciences, Physics, Computational Physics +16

Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. I. Analysis of numerical techniques

Vahid Vahedi, G. DiPeso, C.K. Birdsall et al. · Plasma Sources Science and Technology · 1993 · 204 citations

Natural Sciences, Electrical Engineering, Physics +14

Development of a mesoscale/nanoscale plasma generator

Kazuo Terashima, L. Howald, H. Haefke et al. · Thin Solid Films · 1996 · 33 citations

Natural Sciences, Physics, Nanomaterials +10