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Fabrication of nano-sized resist patterns on flexible plastic film using thermal curing nano-imprint lithography

Materials ScienceNano-imprint LithographyEngineeringFlexible ElectronicsMicrofabricationNanotechnologyNano-sized Resist PatternsFabrication TechniqueApplied PhysicsFlexible Plastic FilmPrinted ElectronicsBeam LithographyNanolithographyNanofabricationElectronic Packaging3D PrintingFlexible SensorNanolithography Method