Wear · 2001 · 19 citations · 5 references
EngineeringManufacturing EngineeringMechanical EngineeringMicrofabricationSurface EngineeringSurface ScienceAbrasive WearMachiningMicrofabrication ProcessesSurface HardnessSurface MicromachiningSurface RoughnessAbrasive MachiningMachining Surface QualityMechanical AbrasionMicroabrasionSurface Abrasion
5
Silicon as a mechanical material
K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations
Performance of a 7-mm microfabricated car
A. Teshigahara, M. Watanabe, N. Kawahara et al. · Journal of Microelectromechanical Systems · 1995 · 33 citations
Engineering, Automotive Engineering, Mechanical Engineering +17