Properties of amorphous silicon carbide film deposited by PECVD on glass

Adhesion testing by the scratch test method: The influence of intrinsic and extrinsic parameters on the critical load

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Natural Sciences, Materials Engineering, Materials Science +17

Reactive plasma deposited SixCyHz films

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Natural Sciences, Materials Science, Physics +10

Preparation of hydrogenated amorphous Si-C alloy films and their properties

Junji Saraie, Yoshihisa Fujii, Masahiro Yoshimoto et al. · Thin Solid Films · 1984 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +12

Properties of hydrogenated amorphous silicon carbide films prepared by plasma-enhanced chemical vapor deposition

D. Kuhman, S. Grammatica, Frank Jansen · Thin Solid Films · 1989 · 42 citations

Natural Sciences, Materials Engineering, Materials Science +14

Chemical vapour deposition of silicon carbide and its applications

Rudolf Brütsch · Thin Solid Films · 1985 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +14