Thin Solid Films · 1984 · 51 citations · 14 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsAmorphous MaterialsAmorphous SolidsSilicon MaterialsThin Film Mechanical PropertiesThin-film DepositionThin-film MaterialsAmorphous AlloysAmorphous SiliconHydrogenated Amorphous Silicon
14