Chemical vapour-deposited silicon nitride

Dependence of Mechanical Strength of Brittle Polycrystalline Specimens on Porosity and Grain Size

Fabienne Knudsen · Journal of the American Ceramic Society · 1959 · 662 citations

Natural Sciences, Materials Engineering, Materials Science +17

MECHANICAL properties of engineering ceramics

W. W. Kriegel, Hayne Palmour, Sheila D. Brack‐Hanes et al. · 1961 · 230 citations

Natural Sciences, Materials Engineering, Materials Science +14

DENSE SILICON NITRIDE

G. G. DEELEY, J. M. Herbert, N.C. Moore · Powder Metallurgy · 1961 · 136 citations

Natural Sciences, Materials Engineering, Materials Science +16

Chemical vapour-deposited silicon nitride

Koichi Niihara, Toshio Hirai · Journal of Materials Science · 1976 · 125 citations

Natural Sciences, Materials Engineering, Materials Science +11

Some Properties of Vapor Deposited Silicon Nitride Films Using the SiH[sub 4]-NH[sub 3]-H[sub 2] System

K.E. Bean, P. S. Gleim, Richard Yeakley et al. · Journal of The Electrochemical Society · 1967 · 96 citations

Natural Sciences, Materials Engineering, Materials Science +17