Monolithically integrated micromachined RF MEMS capacitive switches

Micromachined low-loss microwave switches

Zhilin Yao, S. Chen, S. Eshelman et al. · Journal of Microelectromechanical Systems · 1999 · 390 citations

Engineering, Electrical Engineering, Materials Science +17

A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz

J. Yao, Mau-Chung Frank Chang · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 280 citations

Engineering, Electrical Engineering, Microelectronics +15

Characteristics of micromachined switches at microwave frequencies

C. Goldsmith, John N. Randall, S. Eshelman et al. · 2002 · 217 citations

Engineering, Electrical Engineering, Electromagnetics +16

Fabrication of micromechanical switches for routing radio frequency signals

John N. Randall, Chuck Goldsmith, David Denniston et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 22 citations

Engineering, Electrical Engineering, Antennas +16

The integration of micro-machine fabrication with electronic device fabrication on III-V semiconductor materials

R.H. Hackett, L.E. Larson, M.A. Melendes · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 16 citations

Engineering, Electrical Engineering, Materials Science +17