Concepedia
Surface and Coatings Technology · 2001 · 20 citations · 3 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsElectromagnetismMagnetic MaterialsFerromagnetic MaterialsThin-film DepositionMagnetron SputteringSputter DepositionSputteringSputtering ProcessesSputtering Techniques
3
Average energy deposited per atom: A universal parameter for describing ion-assisted film growth?
I. Petrov, F. Adibi, J. E. Greene et al. · Applied Physics Letters · 1993 · 224 citations
Natural Sciences, Materials Science, Physics +15
Influence of the plasma on substrate heating during low-frequency reactive sputtering of AIN
David A. Glocker · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 100 citations
Natural Sciences, Materials Engineering, Materials Science +17
Tubular hollow cathode sputtering onto substrates of complex shape
John A. Thornton, Virgle L. Hedgcoth · Journal of Vacuum Science and Technology · 1975 · 39 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +16