Influence of rapid thermal annealing on morphological and electrical properties of RF sputtered AlN films

Crack formation in GaAs heteroepitaxial films on Si and SiGe virtual substrates

V. K. Yang, M. Groenert, C. W. Leitz et al. · Journal of Applied Physics · 2003 · 143 citations

Engineering, Materials Engineering, Materials Science +17

Growth of high quality crack-free AlGaN films on GaN templates using plastic relaxation through buried cracks

Jean-Marc Bethoux, P. Vennéguès, F. Natali et al. · Journal of Applied Physics · 2003 · 102 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition

F. Engelmark, G. Fucntes, Ilia Katardjiev et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 92 citations

Natural Sciences, Materials Engineering, Materials Science +17

Pyroelectric properties of AlN

V. Fuflyigin, Edward Salley, A. Osinsky et al. · Applied Physics Letters · 2000 · 83 citations

Natural Sciences, Materials Engineering, Materials Science +13

Effect of substrate composition on the piezoelectric response of reactively sputtered AlN thin films

Judith A. Ruffner, Paul G. Clem, Brace Tuttle et al. · Thin Solid Films · 1999 · 83 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16