Mechanical property measurement of InP-based MEMS for optical communications - Concepedia

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Mechanical property measurement of InP-based MEMS for optical communications

75

Citations

21

References

2003

Year

Marcel W. Pruessner, Todd King, Daniel P. Kelly, Rohit Grover, L. C. Calhoun, Reza Ghodssi

Sensors and Actuators A Physical

EngineeringMicrofabricationMechanicsMechanical EngineeringMechanical Property MeasurementInstrumentationMicro-electromechanical System

References

	Year	Citations

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