Sensors and Actuators A Physical · 2000 · 133 citations · 12 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMicrofabricationThin FilmsMemory DevicesMems FabricationMems MaterialsMicrofabrication MaterialsMicrofabrication ProcessesThin-film MaterialsHigh-temperature Device OperationHigh-temperature MemsMicrovalve DesignMicrovalvesShape Memory
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