Micro injection molding for mass production using LIGA mold inserts

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 958 citations

Engineering, Materials Engineering, Materials Science +16

A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs

Md. Shafiqul Islam, P.J. McNally · Microelectronic Engineering · 1998 · 606 citations

Engineering, Electrical Engineering, Materials Science +14

Hot embossing - The molding technique for plastic microstructures

M. Heckele, W. Bacher, K. Müller · Microsystem Technologies · 1998 · 281 citations

Engineering, Manufacturing Engineering, Materials Engineering +8

Performance and simulation of thermoplastic micro injection molding

Volker Piotter, K. Plewa, R. Ruprecht · Microsystem Technologies · 2002 · 152 citations

Engineering, Manufacturing Engineering, Materials Engineering +12

Injection molding of polymeric LIGA HARMs

Mircea S. Despa, Kevin W. Kelly, John R. Collier · Microsystem Technologies · 1999 · 108 citations

Engineering, Manufacturing Engineering, Materials Engineering +9