A new approach for force measurement and workpiece clamping in micro-ultrasonic machining

State of the Art of Micromachining

T. Masuzawa · CIRP Annals · 2000 · 918 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +10

Micro and Nano Machining by Electro-Physical and Chemical Processes

K. P. Rajurkar, Gideon Levy, Ajay P. Malshe et al. · CIRP Annals · 2006 · 381 citations

Engineering, Manufacturing Engineering, Materials Science +14

Microultrasonic Machining by the Application of Workpiece Vibration

Kai Egashira, Takahisa Masuzawa · CIRP Annals · 1999 · 141 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +14

Micro ultrasonic machining and its applications in MEMS

Xi-Qing Sun, T. Masuzawa, Masahisa Fujino · Sensors and Actuators A Physical · 1996 · 93 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +12

Influence of Debris Accumulation on Material Removal and Surface Roughness in Micro Ultrasonic Machining of Silicon

Ze Yu, Xiaojun Hu, K. P. Rajurkar · CIRP Annals · 2006 · 55 citations

Engineering, Manufacturing Engineering, Materials Engineering +17