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Influence of Debris Accumulation on Material Removal and Surface Roughness in Micro Ultrasonic Machining of Silicon

EngineeringMicro Ultrasonic MachiningMicrofabricationMaterial MachiningMechanical EngineeringMachine ToolDebris AccumulationMaterial RemovalUltrasoundAbrasive MachiningMicromachined Ultrasonic Transducer